Chuck Assemblies

Chuck assembly

Chuck assemblies are an indispensable component of film thickness mapping systems. They offer a steadfast and safe environment where your wafers may be measured with consistent accuracy. The chuck assemblies from Filmetrics® are designed to accommodate wafers of different sizes. The chuck assemblies are made for 2”, 3”, 4”, 5”, 6”, 200mm, 300mm, and 450mm wafers. The F50, F54 and F60 chucks are manufactured with a high level of flexibility in terms of wafer sizes as well adding to their ease-of use.

For more information on Filmetrics® chuck assemblies and other accessories, please contact our U.S. offices by calling +1 858-573-9300 (24 Hr, M-F) or contact us by e-mail.

  • F50 Chuck 100mm F50 chuck assembly

    F50Chuck-100mm

    F50 chuck assembly for 2", 3", & 4" wafers.
  • F50 Chuck 200mm F50 chuck assembly

    F50Chuck-200mm

    F50 chuck assembly for 4", 5", 6", & 200mm wafers.
  • F50 Chuck 300mm F50 chuck assembly

    F50Chuck-300mm

    F50 chuck assembly for 4", 5", 6", 200mm, & 300mm wafers.
  • F50 Chuck 450mm F50 chuck assembly

    F50Chuck-450mm

    F50 chuck assembly for 4", 5", 6", 200mm, 300mm & 450mm wafers.
  • F50 custom chuck assembly

    F50Chuck-Custom

    Custom chucks are available for the F50, usually within four weeks
  • F60 Chuck 200mm F60 chuck assembly

    F60Chuck-200mm

    F60 chuck assembly for 4", 5", 6", & 200mm wafers.
  • F60 Chuck 300mm F60 chuck assembly

    F60Chuck-300mm

    F60 chuck assembly for 4", 5", 6",200mm, & 300mm wafers.