Multi-Point Mapping Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F60-c

Automated cassette-based film thickness mapping
Features: Supports 4" to 300mm wafers.
F60-c 0.02-70 µm 380-1050 nm 1500 μm
F60-c-EXR 0.02-250 µm 380-1700 nm 1500 μm
F60-c-NIR 0.1-250 µm 950-1700 nm 1500 μm
F60-c-UV 0.005-40 µm 190-1100 nm 1500 μm
F60-c-UVX 0.005-250 µm 190-1700 nm 1500 μm
F60-c-XT 0.2-450 µm 1440-1690 nm 1500 μm
F60-c-s980 4-1000 µm 960-1000 nm 10 μm
F60-c-s1310 7-2000 µm 1280-1340 nm 10 μm
F60-c-s1550 10-3000 µm 1520-1580 nm 10 μm