Optical Profilers Model Thickness
Range
Field-of-View Spatial
Sampling

Profilm3D

Step-height and surface roughness measurements
Features: VIS and PSI measurement capabilities. 100mm of motorized X, Y, and Z translation. Tip/Tilt Stage.
* With 10X objective lens.
Profilm3D 0.001-500 µm 2.0 x 1.7 mm * 0.88 µm *
Single-Spot
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F3

Reflectance and film-thickness measurements
Features: Compact, low-cost, non-UV systems have 40k-hour light source.
* Thickness measurement capability is optional.
F3-s980 10-1000 µm * 960-1000 nm 10 μm
F3-s1310 15-2000 µm * 1280-1340 nm 10 μm
F3-s1550 25-3000 µm * 1520-1580 nm 10 μm
In-line
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F32

Compact solution for in-line measurements
Features: Includes spectrometer(s), software, and 10k-hour light source.
F32-s980 10-1000 µm * 960-1000 nm 10 μm
F32-s1310 15-2000 µm * 1280-1340 nm 10 μm
F32-s1550 25-3000 µm * 1520-1580 nm 10 μm
Single-Spot
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F40

Microscope-based thin-film measurement system
Features: Attach to a microscope. Very small spot size.
F40 0.02-20 µm 400-850 nm 1 μm
F40-EXR 0.02-40 µm 400-1700 nm 1 μm
F40-NIR 0.04-40 µm 950-1700 nm 1 μm
F40-UV 0.004-40 µm 190-1100 nm 7 μm
F40-UVX 0.004-40 µm 190-1700 nm 7 μm
Multi-Point Mapping Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F50

Measures thickness etc. at two points/second
Features: Sample chucks (up to 300mm) sold separately.
F50-s980 4-1000 µm 960-1000 nm 10 μm
F50-s1310 7-2000 µm 1280-1340 nm 10 μm
F50-s1550 10-3000 µm 1520-1580 nm 10 μm

F54

Automated film thickness mapping
Features: Sample chucks (up to 450mm) sold separately.
F54 0.02-40 µm 400-850 nm 7 μm
F54-EXR 0.02-100 µm 400-1700 nm 7 μm
F54-NIR 0.04-100 µm 950-1700 nm 7 μm
F54-UV 0.004-30 µm 190-1100 nm 7 μm
F54-UVX 0.004-100 µm 190-1700 nm 7 μm

F60-c

Automated cassette-based film thickness mapping
Features: Supports 4" to 300mm wafers.
F60-c-s980 4-1000 µm 960-1000 nm 10 μm
F60-c-s1310 7-2000 µm 1280-1340 nm 10 μm
F60-c-s1550 10-3000 µm 1520-1580 nm 10 μm

F60-t

Production-oriented film thickness mapping
Features: Includes notch-finding, on-board baselining, and safety interlock.
F60-t-s980 4-1000 µm 960-1000 nm 10 μm
F60-t-s1310 7-2000 µm 1280-1340 nm 10 μm
F60-t-s1550 10-3000 µm 1520-1580 nm 10 μm