Optical Profilers Model Thickness
Range
Field-of-View Spatial
Sampling

Profilm3D

Step-height and surface roughness measurements
Features: VIS and PSI measurement capabilities. 100mm of motorized X, Y, and Z translation. Tip/Tilt Stage.
* With 10X objective lens.
Profilm3D 0.001-500 µm 2.0 x 1.7 mm * 0.88 µm *
Single-Spot
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

aRTie

Reflectance and/or transmittance measurement
Features: Compact, low-cost, non-UV systems have 40k-hour light source.
* Thickness measurement capability is optional.
aRTie-UV 0.001-40 µm * 190-1100 nm 6000 μm

F3

Reflectance and film-thickness measurements
Features: Compact, low-cost, non-UV systems have 40k-hour light source.
* Thickness measurement capability is optional.
F3-UV 0.003-40 µm * 190-1100 nm 100 μm
Single-Spot
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F10-RT

Reflectance and/or transmittance measurement
Features: Accomodates larger samples than F2-RT, has built-in video.
* Thickness measurement capability is optional.
F10-RT-UV 0.003-40 µm * 190-1100 nm 5000 μm
F10-RT-UVX 0.003-150 µm * 190-1700 nm 5000 μm

F20

The world's best-selling thin-film measurement system
Features: Our most versatile model. Includes full thickness and index measurement capabilities.
F20-UV 0.003-40 µm 190-1100 nm 1500 μm
F20-UVX 0.003-250 µm 190-1700 nm 1500 μm

F40

Microscope-based thin-film measurement system
Features: Attach to a microscope. Very small spot size.
F40-UV 0.004-40 µm 190-1100 nm 7 μm
F40-UVX 0.004-40 µm 190-1700 nm 7 μm
In-line
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F30

Complete in-line thickness monitor
Features: Optional high-speed photodiode detectors.
F30-UV 0.003-40 µm 190-1100 nm 1500 μm
F30-UVX 0.003-250 µm 190-1700 nm 1500 μm

F32

Compact solution for in-line measurements
Features: Includes spectrometer(s), software, and 10k-hour light source.
F32-UV 0.003-40 µm 190-1100 nm 1500 μm
F32-UVX 0.003-250 µm 190-1700 nm 1500 μm
Multi-Point Mapping Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F50

Measures thickness etc. at two points/second
Features: Sample chucks (up to 300mm) sold separately.
F50-UV 0.005-40 µm 190-1100 nm 1500 μm
F50-UVX 0.005-250 µm 190-1700 nm 1500 μm

F50-450

Measures thickness on 450mm wafers
Features: Sample chucks (up to 450mm) sold separately.
F50-450-UV 0.005-40 µm 190-1100 nm 1500 μm
F50-450-UVX 0.005-250 µm 190-1700 nm 1500 μm

F50-XY

Measures thickness on large panels
Features: LCD panels are a common application.
F50-XY-UV 0.005-40 µm 190-1100 nm 1500 μm
F50-XY-UVX 0.005-250 µm 190-1700 nm 1500 μm

F54

Automated film thickness mapping
Features: Sample chucks (up to 450mm) sold separately.
F54-UV 0.004-30 µm 190-1100 nm 7 μm
F54-UVX 0.004-100 µm 190-1700 nm 7 μm

F60-c

Automated cassette-based film thickness mapping
Features: Supports 4" to 300mm wafers.
F60-c-UV 0.005-40 µm 190-1100 nm 1500 μm
F60-c-UVX 0.005-250 µm 190-1700 nm 1500 μm

F60-t

Production-oriented film thickness mapping
Features: Includes notch-finding, on-board baselining, and safety interlock.
F60-t-UV 0.005-40 µm 190-1100 nm 1500 μm
F60-t-UVX 0.005-250 µm 190-1700 nm 1500 μm