Single-Spot
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F10-AR

Reflectance measurement of large flat or curved samples
Features: Handheld probe for large samples and maximum versatility.
* Thickness measurement capability is optional.
F10-AR-EXR 0.2-30 µm * 380-1700 nm 100 μm
Single-Spot
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F10-RT

Reflectance and/or transmittance measurement
Features: Accomodates larger samples than F2-RT, has built-in video.
* Thickness measurement capability is optional.
F10-RT-EXR 0.015-150 µm * 380-1700 nm 5000 μm

F20

The world's best-selling thin-film measurement system
Features: Our most versatile model. Includes full thickness and index measurement capabilities.
F20-EXR 0.015-250 µm 380-1700 nm 1500 μm

F40

Microscope-based thin-film measurement system
Features: Attach to a microscope. Very small spot size.
F40-EXR 0.02-40 µm 400-1700 nm 1 μm
In-line
Measurements
Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F30

Complete in-line thickness monitor
Features: Optional high-speed photodiode detectors.
F30-EXR 0.015-250 µm 380-1700 nm 1500 μm

F32

Compact solution for in-line measurements
Features: Includes spectrometer(s), software, and 10k-hour light source.
F32-EXR 0.015-250 µm 380-1700 nm 1500 μm
Multi-Point Mapping Model Thickness
Range
Wavelength
Range
Standard
Spot Size

F50

Measures thickness etc. at two points/second
Features: Sample chucks (up to 300mm) sold separately.
F50-EXR 0.02-250 µm 380-1700 nm 1500 μm

F50-450

Measures thickness on 450mm wafers
Features: Sample chucks (up to 450mm) sold separately.
F50-450-EXR 0.02-250 µm 380-1700 nm 1500 μm

F50-XY

Measures thickness on large panels
Features: LCD panels are a common application.
F50-XY-EXR 0.02-250 µm 380-1700 nm 1500 μm

F54

Automated film thickness mapping
Features: Sample chucks (up to 450mm) sold separately.
F54-EXR 0.02-100 µm 400-1700 nm 7 μm

F60-c

Automated cassette-based film thickness mapping
Features: Supports 4" to 300mm wafers.
F60-c-EXR 0.02-250 µm 380-1700 nm 1500 μm

F60-t

Production-oriented film thickness mapping
Features: Includes notch-finding, on-board baselining, and safety interlock.
F60-t-EXR 0.02-250 µm 380-1700 nm 1500 μm