Tencor® Stylus Profilometers
Tencor® Stylus Profilometers
KLA Instruments™ Alpha-Step® stylus profilometers, Tencor® P-series stylus profilometers and HRP®-series stylus profilometers deliver high-precision, 2D and 3D surface metrology, measuring step height, surface roughness, bow and stress with industry-leading stability and reliability for your R&D and production requirements.
Upcoming Event
View AllEPFL – MicroNanoFabrication Annual Review Meeting
KLA is exhibiting at EPFL – MicroNanoFabrication Annual Review Meeting. We invite you to visit our booth to learn more about our nanoindenter systems.
| Event Date | May 13, 2025 |
| Location | SwissTech Convention Center, Ecublens, Switzerland |
Alpha-Step® D-600 Stylus Profiler
The Alpha-Step D-600 stylus profiler adds a motorized X-Y stage to the Alpha-Step technology, enabling automated mapping of 2D and 3D step height, surface roughness measurements, plus 2D bow and stress.
Tencor® P-7 Stylus Profiler
The Tencor P-7 stylus profiler leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.
Tencor® P-17 & Tencor® P-17 OF Stylus Profilers
The industry-leading Tencor P-17 is the latest generation benchtop stylus profiler built on over 45 years of surface metrology experience, providing precise 2D and 3D step height and surface roughness measurements for R&D and production environments.
Alpha-Step® D-500 Stylus Profiler
The Alpha-Step D-500 is an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments.
Tencor® P-170 Stylus Profiler
The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.
HRP®-260 Stylus Profiler
Built for high throughput and the reliability required in a production environment, the HRP-260 stylus profilometer combines high resolution, long scan capability and cassette-to-cassette wafer handling.
Looking for optical surface profilometers?
View MoreTechnical Literature
Browse application notes and technical papers from KLA Instruments Application Engineers and customers, covering a variety of use cases for KLA Instruments products.
Timeline of Innovation
Since the launch of the Alpha-Step 100 stylus profilometer in 1977, our technical experts have continued to bring key innovations such as advanced topography sensors, ultra-flat scanning stages and fully automated measurement capability to market. Our tools continue to evolve, providing repeatable and accurate measurements for your surface metrology requirements. Learn more about the rich history of innovation of our stylus profilers.
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