Product Description
The Filmetrics F32 advanced-spectrometry system comes in a half-width 3U rack-mount chassis and, with additional spectrometers, can measure up to four different locations (up to two locations for -EXR and -UVX versions.) The F32 software can be controlled through digital I/O or the host software to start/stop/reset measurements. Measurement data can be exported automatically to the host software for statistical process control (SPC).
Product Features
- Optional lens assemblies can help easily integrate onto existing production fixtures
- Included software and USB connectivity make installing the F32 onto any Windows-platform PC simple
- FILMeasure software, preloaded with over 100 materials enables quick measurements of single and multilayer stacks
- 24-hour (M-F) phone, email, and online support from highly trained application engineers
Applications
- Measure film-thickness in-line in real time
- Measure deposition rate, optical constants, and material uniformity
Industries
- Semiconductors
- Compound Semiconductors