Photoresist Thickness Measurement

Several single-spot tabletop and mapping tools, including the F3-sX, Filmetrics F50 and Filmetrics F60-t, measure photoresist thickness and etch rate of single-layer, multiple-layer, and even freestanding photoresist films. All Filmetrics models measure resist thickness (and index) by accurately modeling spectral reflectance. Special proprietary algorithms allow robust “one-click” analysis, with results typically available in less than a second. Measurement of SU-8 thickness, Dow BCB thickness and other thick photoresists are popular applications for the Filmetrics product line.

Porous Silicon Thin Film Measurement

Porous silicon has significant usage in a wide range of applications, including optical devices, gas sensors, and biomedical devices.

Porous thin-film measurements of interest for the industry include layer thickness and porosity. In general, non-destructive methods like gravimetric measurements are used to measure porosity, but the accuracy of this method is very low. Filmetrics^® F50 offers a free, unique analysis algorithm that reveals layer thickness, index, and porosity of porous silicon with a single mouse-click.

Semiconductor Process Films Measurement

Filmetrics^® product line offers a full range of instruments and systems for measuring thickness and index of any non-metallic semiconductor process film.

The Filmetrics F50 film thickness mapper accurately measures film thickness and automatically maps point-by-point of blanket films.

Our patented thickness imaging technology results in easier set up, fewer recipes, more robust pattern recognition, and much lower cost than conventional thin-film metrology tools.

Silicon Wafer and Membrane Thickness Measurement

Filmetrics^® systems include tabletop, mapping, and production systems for silicon wafer thickness measurement and membrane thickness measurement. Wafer materials commonly measured include single polished or double polished Si (Silicon), Sapphire, Fused Silica, SiC, LiTaO₃, GaN, and Glass.

Our technical experts can help you find the best Filmetrics tool that fits your thickness measurement requirements that may include a need for various thickness ranges or a single-spot measurement vs. thickness mapping requirement, etc.