Semiconductor: Photoresist Thickness Measurement

Several single-spot tabletop and mapping tools such as the Filmetrics F20, Filmetrics F3-sX, Filmetrics F50 and Filmetrics F60-t measure photoresist thickness and etch rate of single-layer, multi-layer photoresist films. All Filmetrics models measure resist thickness (and index) by accurately modeling spectral reflectance. Special proprietary algorithms allow robust “one-click” analysis, with results typically available in less than a second. Measurement of SU-8 thickness, Dow BCB thickness and other thick photoresists are popular applications for the Filmetrics product line.

Silicon Wafer and Membrane Thickness Measurement

Filmetrics^® systems include tabletop, mapping, and production systems for silicon wafer thickness measurement and membrane thickness measurement. Wafer materials commonly measured include single-polished or double-polished Silicon, Sapphire, Fused Silica, SiC, LiTaO₃, GaN, and Glass.

Our technical experts can help you find the best Filmetrics tool that fits your thickness measurement requirements, which may include a need for various thickness ranges, single-spot measurement, thickness mapping, etc.

Liquid Crystal Displays (LCDs)

Measure cell gaps and thickness of polyimides, indium tin oxide (ITO) and transparent conductive oxide (TCO) films. The comprehensive Filmetrics material library and advanced modeling algorithms deliver the advanced capabilities needed for measuring LCD and OLED layers.

Optical Coatings and Electro-optical Films

Measure the thickness of hardcoats, anti-reflective coatings and filters. With spectral reflectance and Filmetrics advanced modeling algorithms, you can model more than 10 layers effectively.