Automated Film Thickness Mapping

Thin-film thickness of samples up to 450 mm in diameter are mapped quickly and easily with the F54 advanced spectral reflectance system. The motorized r-theta stage moves automatically to selected measurement points and provides thickness measurements as fast as two points per second.

Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points. The entire desktop system is set up in minutes and can be used by anyone with basic computer skills.

The F54 film thickness mapping system connects to the USB port of your Windows® computer and can be set up in minutes.

The different instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F54-UV) are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

What's Included

Model Specifications

*Material and microscope dependent
Model Thickness Range* Wavelength Range
F54 20nm-40µm 380-850nm
F54-UV 4nm-30µm 190-1100nm
F54-NIR 40nm-100µm 950-1700nm
F54-EXR 20nm-100µm 380-1700nm
F54-UVX 4nm-100µm 190-1700nm
Spot Size 500µm Aperture 250µm Aperture 100µm Aperture 50µm Aperture
5x Objective: 100µm 50µm 20µm 10µm
10x Objective: 50µm 25µm 10µm 5µm
15x Objective: 33µm 17µm 7µm 3.5µm
50x Objective: 10µm 5µm 2µm 1µm

Additional Perks

  • Library with over 130 materials included with every system, along with access to 100s more
  • Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
  • Online "Hands On" support (internet connection required)
  • Hardware upgrade program

Common Optional Accessories