Automated Film Thickness Mapping
Thin-film thickness of samples up to 450 mm in diameter are mapped quickly and easily with the F54 advanced spectral reflectance system. The motorized r-theta stage moves automatically to selected measurement points and provides thickness measurements as fast as two points per second.

Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points. The entire desktop system is set up in minutes and can be used by anyone with basic computer skills.

The F54 film thickness mapping system connects to the USB port of your Windows® computer and can be set up in minutes.

The different instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F54-UV) are required for measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

Model Specifications

Model Thickness Range* Wavelength Range
F54 20nm - 45µm 380-1050nm
F54-UV 4nm - 35µm 190-1100nm
F54-NIR 100nm - 115µm 950-1700nm
F54-EXR 20nm - 115µm 380-1700nm
F54-UVX 4nm - 115µm 190-1700nm
*Material and objective dependent

Thickness Range*

F54-UV F54-UVX F54 F54-EXR F54-NIR 1nm 10nm 100nm 1µm 10µm 100µm 1mm
F54-UV F54-UVX F54 F54-EXR F54-NIR 1nm 10nm 100nm 1µm 10µm 100µm 1mm

What’s Included

Additional Perks

Common Optional Accessories