R50 Series

Sheet Resistance Measurement

Filmetrics R-Series sheet resistance mapping tools marry the technology developed and perfected by KLA for over 45 years with the benchtop instrument technology developed over the last 20 years by the Filmetrics team. The R50-4PP contact four-point probe is recommended for thin metal and ion implant layers, and the R50-EC non-contact eddy current probe is recommended for thicker metal layers and soft or flexible surfaces, including:

  • Semiconductor wafer substrates
  • Glass substrates
  • Plastic (flexible) substrates
  • PCB patterned features
  • Solar Cells
  • Flat panel display layers and patterned features
  • Metal foils

Models

Model Sensor Type Measurement
Range
Maximum
Map
Diameter
XY Stage
Range
Maximum
Sample
Width
Maximum
Sample
Height
R50-4PP Contact 4PP 1mΩ/sq -
200MΩ/sq
100mm 100mm x
100mm
265mm 100mm
R50-EC Non-contact
eddy current
1mΩ/sq -
10Ω/sq
100mm 100mm x
100mm
265mm 100mm
R50-200-4PP Contact 4PP 1mΩ/sq -
200MΩ/sq
200mm 200mm x
200mm
365mm 100mm
R50-200-EC Non-contact
eddy current
1mΩ/sq -
10Ω/sq
200mm 200mm x
200mm
365mm 100mm

Sheet Resistance and Other Measurement Applications

The R50 4-point probe (4PP or FPP) and eddy current probe measurement techniques support a wide range of measurements, including but not limited to the following:

  • Metal film and backside layer thickness measurements
  • Substrate resistivity
  • Sheet resistance
  • Thin film thickness or resistivity
  • Sheet and bulk conductivity
  • Stacked films

Common Optional Accessories