Filmetrics and KLA are working to merge our core technologies. KLA has been measuring sheet resistance and related electrical properties using both contact methods and non-contact methods for over 30 years. Filmetrics has over 20 years of transparent film measurement experience. Now we are combining our two core capabilities to extend the Filmetrics’ product lines to measure metal film characteristics.
Measuring conductive thin films on:
|P3D-Rs20||Manual single point measurement small sample stage with contact and non-contact probes|
|P3D-Rs50||Mapping motorized measurement 200mm stage with contact and non-contact probes|
|P3D-Rs60||Production Mapping motorized measurement 200mm stage with contact and non-contact probes|
A wide range of measurements are being supported, including but not limited to the following: