Sheet Resistance Measurement

Filmetrics® sheet resistance measurement tools marry the technology developed and perfected by KLA for over 30 years with the bench-top instrument technology developed over the last 20 years by the Filmetrics team. KLA technologies include both contact and non-contact methods. The Filmetrics family of sheet resistance measurement instruments can measure conductive sheets and thin films deposited on various substrates including:

  • Semiconductor wafer substrates
  • Glass substrates
  • Plastic (flexible) substrates
  • PCB patterned features
  • Solar Cells
  • Flat panel display layers and patterned features
  • Metal foils

Models

Model Description
R50-4PP Uses four-point probe to measure sheet resistance; 100mm travel motorized x-y stage; maps samples up to 100mm in diameter; accommodates samples up to 200mm in diameter
R50-EC Uses non-contact eddy-current probe to measure sheet resistance; 100mm travel motorized x-y stage; maps samples up to 100mm in diameter; accommodates samples up to 200mm in diameter
R50-200-4PP Uses four-point probe to measure sheet resistance; 200mm travel motorized x-y stage; maps samples up to 200mm in diameter
R50-200-EC Uses non-contact eddy-current probe to measure sheet resistance; 200mm travel motorized x-y stage; maps samples up to 200mm in diameter

Typical Applications

A wide range of measurements are being supported, including but not limited to the following:

  • Metal film thickness
  • Substrate thickness
  • Sheet Resistance
  • Resistivity
  • Conductivity
  • Stacked films