The Filmetrics^® F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling. The re-engineered F60-c combines Filmetrics film thickness mapping technology with the improved automation of KLA Instruments™ production metrology systems.

The different F60-c instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g., F60-c-UV) are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.