Chuck Assemblies

Chuck assemblies are an indispensable component of film thickness mapping systems. They offer a steadfast and safe environment where your wafers may be measured with consistent accuracy. The chuck assemblies from Filmetrics® are designed to accommodate wafers of different sizes. The chuck assemblies are made for 2”, 3”, 4”, 5”, 6”, 200mm, 300mm, and 450mm wafers. The F50, F54 and F60 chucks are manufactured with a high level of flexibility in terms of wafer sizes as well adding to their ease-of use.

For more information on Filmetrics^® chuck assemblies and other accessories, please contact our U.S. offices by calling +1 858-573-9300 (24 Hr, M-F) or contact us by e-mail.